| Tester Parameter | Premier |
| Voltage Range (built-in drive voltage) | ±10V, ±30V, ±100V, ±200V or ±500V built-in |
| Voltage Range with an external amplifier and high voltage interface (HVI) | 10KV |
| Number of ADC Bits | 18 |
| Minimum Charge Resolution | 0.80fC |
| Minimum Area Resolution (assuming 1 ADC bit = 1μC/cm2) | 0.080μ2 |
| Maximum Charge Resolution | 5.26mC |
| Maximum Area Resolution (assuming saturation polarization = 100μC/cm2) | 52.6cm2 |
| Maximum Charge Resolution with High Voltage Interface (HVI) | 526mC |
| Maximum Area Resolution (assuming saturation polarization = 100μC/cm2) w/o HVI | >100cm2 |
| Maximum Hysteresis Frequency | 250KHz @ 10V 50KHz @ 30V 50KHz @ 100V 50KHz @ 200V 2KHz @ 500V |
| Minimum Hysteresis Frequency | 0.03Hz |
| Minimum Pulse Width | 0.5μs |
| Minimum Pulse Rise Time (5V) | 400ns |
| Maximum Pulse Width | 1s |
| Maximum Delay between Pulses | 40ks |
| Internal Clock | 25ns |
| Minimum Leakage Current (assuming max current integration period = 1 seconds) | 1pA |
| Maximum Small Signal Cap Frequency | 1MHz |
| Minimum Small Signal Cap Frequency | 1Hz |
| Output Rise Time Control | 105 scaling |
| Input Capacitance | -6fF |
| Electrometer Input All Test Frequencies for all test at any speed | Yes |
| * The minimum area resolution under actual test conditions depends upon the internal noise environment of the tester, the external noise environment, and the test jig parasitic capacitance. | |
| *** Tester specifications are subject to change without notice. | |